Dark Field(暗場缺陷檢測)

17c起草官网半導體專注於半導體工藝設備的研發、製造、銷售及售後一體化服務,提供半導(dǎo)體廠商工藝設(shè)備的一站式解決方案。

關鍵(jiàn)詞:

半導體設備、半(bàn)導體工(gōng)藝

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產品谘(zī)詢:

產品描述

Dark Field detectors collect scattered light over a large angular range, which provides high sensitivity for detection of small defects. Particles, scratches, missing patterns, as well as other surface contamination and pattern anomalies on the surface of the wafer scatter the incident laser light in various understood patterns.

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